Equipment Front End Module
EFEM
Equipment Front End Module (EFEM) is an automated transport system designed for the semiconductor manufacturing industry, capable of efficiently handling wafers. Chain We Company's EFEM can accurately position and align wafers, and seamlessly connect with other process equipment, improving productivity and quality. Our EFEM is a suitable solution for handling wafers in the semiconductor manufacturing industry, meeting the high requirements for stability and accuracy of customers.
2 Port EFEM wafer handling system
The 2 Port EFEM wafer handling system is particularly developed for wafer handling purpose...
Details17 Port EFEM wafer handling system
17 Port EFEM optimized wafer handling system for semiconductor manufacturing. The EFEM (Equipment...
Details4 Port EFEM wafer handling system
Advanced 4 Port EFEM Wafer Handling for Semiconductor Industries Discover the unparalleled...
DetailsHow Can EFEM Systems Reduce Wafer Contamination and Improve Yield Rates in Our Fab?
Our EFEM wafer handling modules provide enclosed, controlled transport that minimizes particle exposure during wafer transfer between process tools. With precise positioning accuracy and seamless equipment integration, our systems reduce handling errors and contamination risks that directly impact your yield rates. Let our 30+ years of automation expertise help you achieve higher productivity and quality standards—contact us for a customized assessment of your fab's specific requirements.
The EFEM wafer handling module significantly enhances productivity and manufacturing quality by ensuring consistent, contamination-free wafer transfer between processing stations. Our comprehensive one-stop automation service encompasses everything from initial system planning and custom design through manufacturing, installation, and ongoing maintenance support. Backed by state-of-the-art production facilities equipped with Industry 4.0 manufacturing technology, we deliver customized EFEM solutions that address your specific semiconductor manufacturing challenges while maximizing throughput and minimizing defect rates. Contact us today to discover how our EFEM systems can optimize your wafer handling processes and elevate your semiconductor production capabilities.
One-stop automation service
Comprehensive automation service from planning, design, manufacturing, installation, and ongoing maintenance and support.
Customized Solutions
Expert in automatic conveying systems for various industries. 30+ years of experience in Taiwan and worldwide.
Various conveyors
Various and customized conveying systems for your needs and serve a wide range of industries.




