Equipment Front End Module
EFEM
Equipment Front End Module (EFEM) is a high-performance and reliable solution for semiconductor manufacturing. EFEM is a module that connects the wafer handling system and the process equipment, and provides functions such as wafer loading, unloading, alignment, and inspection. EFEM can improve the efficiency, accuracy, and safety of wafer handling, and reduce the risk of contamination and damage.
EFEM system
At Chain We, Equipment Front End Module (EFEM) can cooperate with various AOI wafer inspection...
DetailsEFEM for Semiconductor
EFEM System is a reliable and efficient way to handle your wafers in your semiconductor manufacturing...
DetailsEFEM Wafer Handling Module
EFEM Wafer Handling Module is a device that transfers wafers between different modules or stations...
DetailsHow Can EFEM Reduce Wafer Contamination and Improve Fab Yield Rates?
Our EFEM system creates a controlled interface between wafer carriers and process tools, minimizing exposure to contaminants during critical transfer operations. With precision alignment and automated inspection capabilities, we help semiconductor fabs achieve higher yield rates and reduce costly wafer damage. Contact our automation specialists to learn how our customized EFEM solutions can optimize your fab's performance and ROI.
With over 30 years of expertise in customized automation solutions, Chain We's EFEM significantly improves operational efficiency, accuracy, and safety in wafer handling operations while dramatically reducing the risk of contamination and wafer damage. Our state-of-the-art 14,500 square meter production facility equipped with Industry 4.0 manufacturing technology enables us to deliver precisely engineered EFEM solutions tailored to your specific semiconductor manufacturing requirements. From initial planning and design through manufacturing, installation, and ongoing maintenance support, we provide comprehensive one-stop automation service to optimize your fab's productivity and yield performance.
One-stop automation service
Comprehensive automation service from planning, design, manufacturing, installation, and ongoing maintenance and support.
Customized Solutions
Expert in automatic conveying systems for various industries. 30+ years of experience in Taiwan and worldwide.
Various conveyors
Various and customized conveying systems for your needs and serve a wide range of industries.




