2 Port EFEM wafer handling system
The 2 Port EFEM wafer handling system is particularly developed for wafer handling purpose in the semiconductor industry, which can be applied to the loading / unloading operations between numerous semiconductor processes:
1. With high dust-free level, high stability and high precision...etc.
2. Compatible with the handling process of various AOI wafer inspection equipment.
3. Can be customized by OEM / ODM and designed according to actual workflow.
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How Can You Achieve Contamination-Free Wafer Transfer in Your Fab?
Our 2 Port EFEM system delivers high dust-free level performance with precision handling specifically designed for semiconductor cleanroom environments. With customizable configurations for your loading/unloading processes and proven stability across multiple wafer handling operations, we ensure your fab maintains the stringent contamination control required for optimal yield. Contact us to discuss how our 30+ years of automation expertise can optimize your wafer transfer operations.
With over 30 years of expertise in customized automation solutions, we offer comprehensive OEM/ODM capabilities to design and manufacture EFEM systems tailored to your specific semiconductor manufacturing requirements. Our 2 Port EFEM wafer handling system is manufactured in our state-of-the-art 14,500 square meter facility equipped with Industry 4.0 technology, ensuring consistent quality and precision. From initial planning and design through manufacturing, installation, and ongoing maintenance support, we provide complete one-stop automation service to optimize your wafer handling operations and enhance production yield in the demanding semiconductor industry.
One-stop automation service
Comprehensive automation service from planning, design, manufacturing, installation, and ongoing maintenance and support.
Customized Solutions
Expert in automatic conveying systems for various industries. 30+ years of experience in Taiwan and worldwide.
Various conveyors
Various and customized conveying systems for your needs and serve a wide range of industries.



