EFEM system
At Chain We, Equipment Front End Module (EFEM) can cooperate with various AOI wafer inspection machines to provide customized service requirements. Our EFEM System is compatible with both FOUP and OPEN CASSETTE load ports, and can use either vacuum chuck or edge clamping chain forks to handle the wafers. Whether you need a single module or a complete system, we can provide you with the best solution for your EFEM System. Contact us today to find out more about our customized EFEM System solutions.
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EFEM for Semiconductor
EFEM System is a reliable and efficient way to handle your wafers in your semiconductor manufacturing...
DetailsEFEM Wafer Handling Module
EFEM Wafer Handling Module is a device that transfers wafers between different modules or stations...
Details
How Can We Ensure Seamless Integration Between EFEM Systems and Our Existing Wafer Inspection Equipment?
Chain We's EFEM systems are engineered for universal compatibility with various AOI wafer inspection machines and support both FOUP and OPEN CASSETTE load ports. Our 30+ years of customization expertise ensures seamless integration with your existing infrastructure. Contact our engineering team for a tailored assessment of your facility's specific requirements and discover how we can optimize your wafer handling workflow.
With over 30 years of expertise in factory automation and material handling, Chain We provides comprehensive EFEM solutions ranging from single module configurations to complete integrated systems. Our state-of-the-art 14,500 square meter production facility equipped with Industry 4.0 manufacturing technology enables us to deliver customized service requirements tailored to your specific semiconductor automation needs. From initial planning and design through manufacturing, installation, and ongoing maintenance support, we offer end-to-end service to optimize your wafer handling processes. Contact us today to discover how our customized EFEM system solutions can enhance your semiconductor production efficiency.
One-stop automation service
Comprehensive automation service from planning, design, manufacturing, installation, and ongoing maintenance and support.
Customized Solutions
Expert in automatic conveying systems for various industries. 30+ years of experience in Taiwan and worldwide.
Various conveyors
Various and customized conveying systems for your needs and serve a wide range of industries.



