EFEM for Semiconductor Wafer Handling Systems | Chain We
Customized EFEM systems for semiconductor manufacturing. Compatible with FOUP and OPEN CASSETTE load ports, vacuum chuck or edge clamping options.
EFEM for Semiconductor
EFEM System is a reliable and efficient way to handle your wafers in your semiconductor manufacturing process. EFEM for Semiconductor can cooperate with various AOI wafer inspection machines and use different types of load ports and wafer handling methods.
Our EFEM Systems are compatible with both FOUP and OPEN CASSETTE load ports, and can use either vacuum chuck or edge clamping chain forks to handle the wafers. They can also be customized according to your specific needs and preferences.
If you are interested in our EFEM System or any other product, please feel free to contact us. We will be happy to provide you with more information and a quote.
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How Can We Ensure Seamless Integration Between EFEM Systems and Our Existing Wafer Inspection Equipment?
Our EFEM systems are specifically engineered to cooperate with various AOI wafer inspection machines and support both FOUP and OPEN CASSETTE load ports. With customizable configurations including vacuum chuck and edge clamping chain forks, we ensure perfect compatibility with your current manufacturing setup. Contact our engineering team for a detailed integration assessment and customized solution proposal.
With over 30 years of expertise in customized conveying systems and factory automation, Chain We Machinery delivers comprehensive EFEM solutions tailored to your specific manufacturing requirements. Our state-of-the-art 14,500 square meter production facility equipped with Industry 4.0 technology enables us to provide end-to-end service from initial planning and design through manufacturing, installation, and ongoing maintenance support. Whether you need integration with existing AOI inspection equipment or a completely customized wafer transport system, our engineering team is ready to develop the optimal EFEM configuration for your semiconductor fabrication needs. Contact us today for detailed specifications and a customized quote.
One-stop automation service
Comprehensive automation service from planning, design, manufacturing, installation, and ongoing maintenance and support.
Customized Solutions
Expert in automatic conveying systems for various industries. 30+ years of experience in Taiwan and worldwide.
Various conveyors
Various and customized conveying systems for your needs and serve a wide range of industries.