How Can You Eliminate Wafer Contamination During Inter-Station Transfer?

Our EFEM Wafer Handling Module features a completely sealed cleanroom environment that prevents dust and particle contamination during wafer transfer between processing stations. With intelligent environmental controls and contamination-free design, you can maintain wafer quality standards while reducing defect rates. Contact us to learn how our proven solution can protect your high-value wafers throughout your fabrication process.

Built with a flexible and modular design, our EFEM Wafer Handling Module can be configured to suit your specific layout and capacity requirements, making it an ideal solution for diverse cleanroom applications. The user-friendly and intelligent control system allows operators to easily adjust settings and monitor operations in real-time, ensuring optimal performance and efficiency. With over 30 years of expertise in customized automation solutions and state-of-the-art manufacturing capabilities, we provide comprehensive support from initial planning through installation and ongoing maintenance, delivering a complete one-stop automation service tailored to your semiconductor manufacturing needs.